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portada Chemical Solution Deposition of Functional Oxide Thin Films
Type
Physical Book
Publisher
Author
Language
English
Pages
813
Format
Paperback
ISBN13
9783709119150
Edition No.
1

Chemical Solution Deposition of Functional Oxide Thin Films

Schneller Theodor,Waser Rainer,Kosec Marija (Author) · Springer · Paperback

Chemical Solution Deposition of Functional Oxide Thin Films - Schneller Theodor,Waser Rainer,Kosec Marija

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Synopsis "Chemical Solution Deposition of Functional Oxide Thin Films"

This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980's. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed "cooking recipes" for selected material systems are offered.

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