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portada Thin Films on Silicon: Electronic and Photonic Applications
Type
Physical Book
Publisher
Author
Language
English
Pages
552
Format
Hardcover
Dimensions
24.6 x 17.3 x 3.6 cm
Weight
1.11 kg.
ISBN13
9789814740470
Categories

Thin Films on Silicon: Electronic and Photonic Applications

Narayanan, Vijay ; Frank, Martin M. ; Demkov, Alexander A. (Author) · World Scientific Publishing Company · Hardcover

Thin Films on Silicon: Electronic and Photonic Applications - Narayanan, Vijay ; Frank, Martin M. ; Demkov, Alexander A.

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Synopsis "Thin Films on Silicon: Electronic and Photonic Applications"

This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.

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